DOP series (Piston pump)
GLD series (Oil Sealed rotary vacuum pump)
VDN series (Oil Sealed rotary vacuum pump)
PVD –series Oil Sealed rotary vacuum pump
VSN-series Oil Sealed rotary vacuum pump
NB series Booster Pump
NRL series Dry Pump
YM pump Unit
Option parts and vacuum oil
NOC series (Oil cleaner)
NWS series (Oil water separator)
NRL60A / NRL90A / NRL180A Dry Pump
NRL series: Uniformity of low temperature distribution. Suitable for the important process of cavity’s evacuation which wants to increase the flow rate and shorten the exhaust time.
Low vibration and noise
Excellent in corrosion resistance
The internal components are specially treated by giving a high degree of surface hardness and corrosion resistance. This helps prevent the internal parts of pump from corrosion when exposed to corrosive gases.
? Evacuation of activated gas (CVD and etching, etc).
? Evacuation of inert gas (PVD, evaporation,heat treatment processes etc).
? Evacuation of gases on the process which generate powders (Si crystal growing furnaces, etc).
? Backing pump for turbo-molecular pumps and mechanical booster pumps, etc.
* 2 No condensation.
* 3 The value of a pressure gauge adjusted with a regulating valve.
* 4 Nitrogen (sealed gas) flow 5.0 SLM is a fixed value.